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Patent Browser Popular Electronics Frequency comb feedback control for s...
Patent

Frequency comb feedback control for scanning probe micros...

2019 22 Figs Electronics ...

In order to meet the needs of the semi-conductor industry as it requires finer lithography nodes, a method of feedbac...

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In order to meet the needs of the semi-conductor industry as it requires finer lithography nodes, a method of feedback control for scanning probe microscopy generates a microwave frequency comb of harmonics in a tunneling junction by irradiating t...

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Patent ID: US-10401383-B2
Publication Date: September 2019
Category: Electronics & Technology
Inventors:
Assignee:
Classification:
Title:
Frequency comb feedback control for scanning probe microscopy
Abstract:
In order to meet the needs of the semi-conductor industry as it requires finer lithography nodes, a method of feedback control for scanning probe microscopy generates a microwave frequency comb of harmonics in a tunneling junction by irradiating the junction with mode-locked pulses of electromagnetic radiation. Utilizing power measurements within one or more harmonics, the tip-sample distance in the tunneling junction may be regulated for maximum efficiency and avoid tip crash when used with r...

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